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Abstract:
The present paper aims at designing and simulating a MEMS piezoelectric power generating framework by utilizing ambient pressure fluctuations. A complete design flow that includes detailed architecture, necessary dimensioning and theoretical computations are done to verify the simulated model is established using Finite element method. COMSOL Multiphysics 5.0, with its powerful engine and appalling GUI provided a major impetus for modeling and simulating the proposed design accurately. The in-built Eigen frequency analysis tool and Frequency domain analysis tool were used to establish the much needed parameters on which the whole paper is based viz – Effective volume in mm 3 , Power in μW and Power density expressed in μW/mm 3 A 10150 μm cantilever with integrated DPL type BAW resonator is used for lowering the resonant frequency. A multi-structured BAW resonator is used to synthesize enough mechanical stress at resonance such that electrical output observed at terminals is maximized. Using available resources the thickness of the active Si diaphragm is optimized within the SPL range 60-90 dB, a detailed calculation of which is presented. Test results indicated a volume of 0.0145 mm 3 , maximum power of 70 μW and power density equal to 4.83 mW/mm 3 at resonant frequency 140 Hz for 2.5117 g acceleration.